Advances in MEMS integration with planar waveguide devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4654, Issue , 2002, Pages 1-12

  Kubby, J A ^a  

^a XEROX CORPORATION   (United States)

Author keywords

Micro opto electro mechanical systems; MOEMS; Optical integration; Photonic light circuits; PLC

Indexed keywords

FIBER OPTIC NETWORKS; INTEGRATION; MICROELECTROMECHANICAL DEVICES; OPTICAL SWITCHES; WAVELENGTH DIVISION MULTIPLEXING;

MICROOPTOELECTROMECHANICAL SYSTEMS; OPTICAL INTEGRATION; PHOTONIC LIGHT CIRCUITS; PLANAR WAVEGUIDE DEVICES;

OPTICAL WAVEGUIDES;

EID: 0036408154     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.463840     Document Type: Conference Paper

References (15)

1. A. Vonsovici, I.E. Day, A. House, and M. Asghari, "ASOC multi-channel electronic variable attenuator", Silicon-based and Hybrid Optoelectronics III, SPIE Vol. 4293, pp. 1-9, 2001.
2. A. Himeno, K. Kato, and T. Miya, "Silica-based planar lightwave circuits", J. Selected Topics in Quantum Electronics 4 (6), pp. 913-924, 1998.
3. T. Miya, "Silica-based planar lightwave circuits: Passive and thermally active devices", J. Selected Topics in Quantum Electronics 6 (1), pp. 38-45, 2001.
4. C. Ciminelli, F. Meli, and G. Grasso, "Optical switching technologies and their applications", Proc. SPIE 4277, pp. 33-52, 2001.
5. Y. Silberberg, P. Pelmutter, and J.E. Baran, "Digital optical switch", Appl. Phys. Lett. 51 (16), pp. 1230-1232, 1987.
6. L. Eldada and L. W. Shacklette, "Advances in polymer waveguides", J. Selected Topics in Quantum Electronics 6 (1), pp. 54-68, 2000.
7. T. Goh et al., J. Lightwave Technol. 19, pg. 371, 2001.
8. E. Ollier, P. Labeye, and F. Revol, "Micro-opto mechanical switch integrated on silicon", Electronics Lett. 31 (23), pp. 2003-2005, 1995.
9. E. Ollier, P. Labeye, and P. Mottier, "Micro-opto-mechanical switch for optical fibre networks", Functional photonics integrated circuits, Photonics West '95, San Jose, CA, 4-10 February 1995, SPIE Vol. 2401.
10. E. Ollier and P. Mottier, "Integrated electrostatic micro-switch for optical fibre networks driven by low voltage", Electronics Lett. 32 (21), pp. 2007-2009, 1996.
11. E. Ollier, P. Mottier, "Low voltage, wavelength and polarization independent micro-opto-mechanical switch integrated on silicon", ECIO '97, Stockholm (Sweden), April 2-4, 1997.
12. E. Ollier, C. Chabrol, T. Enot, P. Brunet-Manquat, J. Margail, P. Mottier, "1×8 micro-mechanical switches based on moving waveguides for optical fiber network switching", 2000 IEEE/LEOS International Conference on Optical MEMS, Kauai, Hawaii, 21-24 August 2000, pp. 39-40, 2000.
13. J.E. Fouqet, Technical Digest of OFC 2000, pp. 204-206, 2000.
14. M. Makihara, M. Mato, F. Shimokawa, and Y. Nishida, "Micromechanical optical switches based on thermo-capillary integrated waveguide substrate", J Lightwave Technol. 17, pp. 14-18, 1999.
15. M. Sato, M. Horia, N. Kitano, K. Ohtomo, H. Ohano, "Thermo-capillary optical switch", Hitachi Cable Review No. 20, pp. 19-24, 2001.