Femtosecond laser machining of fluidic microchannels for miniaturized bioanalytical systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4637, Issue , 2002, Pages 212-217

  Ben Yakar, Adela ^a   Byer, Robert L ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

Ablation rate; Borosilicate glass; Damage threshold; Micro channels; Microfluidics; Micromachining; Optical penetration depth; Ultrafast lasers

Indexed keywords

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; BOROSILICATE GLASS; ELECTRON MICROSCOPY; FLUIDICS; LASER ABLATION; LITHOGRAPHY; MICROMACHINING; OPTICAL MICROSCOPY; PLASMAS; VACUUM;

FEMTOSECOND LASERS; FLUIDIC MICROCHANNELS;

LASER BEAMS;

EID: 0036405140     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.470625     Document Type: Conference Paper

References (4)

1. S. Preuss, A. Demchuk, M. Stuke, "Sub-picosecond UV laser ablation of metals," Appl. Phys. A 61, pp. 33, 1995.
2. J. Bonse, J.M. Wrobel, J. Krüger, and W. Kautek, "Ultrashort-pulse laser ablation of indium phosphide in air," Appl. Phys. A 72, pp. 89-94, 2001.
3. W. Kautek, J. Krüger, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, "Laser ablation of dielectrics with pulse durations between 20 fs and 3 ps," Appl. Phys. Lett. 69 (21), pp. 3146-3148, 1996.
4. M. Lenzner, J. Krüger, S. Sartania, Z. Cheng, Ch. Spielmann, G. Mourou, W. Kautek, and F. Krausz, "Femtosecond optical breakdown in dielectrics," Phys. Rev. Lett. 80 (18), pp. 4076-4079, 1998.