Processing of silicon by Nd:YAG-lasers with harmonics generation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4637, Issue , 2002, Pages 496-504

  Michael, Panzner ^a   Jörg, Kasper ^a   Hendrik, Wust ^a   Udo, Klotzbach ^a   Eckhard, Beyer ^a  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

Laser ablation; Laser cutting; Laser processing; Microstructure processing; Silicon

Indexed keywords

ETCHING; HARMONIC GENERATION; LASER ABLATION; LASER BEAM CUTTING; MICROSTRUCTURE; NEODYMIUM LASERS; PLASMA HEATING; SEMICONDUCTOR LASERS; X RAYS;

SELECTIVE BONDING;

SILICON;

EID: 0036403692     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.470659     Document Type: Conference Paper

References (7)

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