Relationship between hardness and lattice parameter for TiN films deposited on SUS 304 by an IBAD technique

Surface and Coatings Technology

Volumn 158-159, Issue , 2002, Pages 690-693

  Yokota, Katsuhiro ^a   Nakamura, Kazuhiro ^a   Kasuya, Tomohiko ^a   Tamura, Susumu ^a   Sugimoto, Takashi ^a   Akamatsu, Katsuya ^a   Nakao, Kazuyoshi ^a   Miyashita, Fumiyoshi ^a  

^a KANSAI UNIVERSITY   (Japan)

Author keywords

Ion beam assisted deposition (IBAD); Permittivity; Preferred orientation; Titanium nitride

Indexed keywords

DEPOSITION; HARDNESS; ION BEAM ASSISTED DEPOSITION; STAINLESS STEEL; SUBSTRATES;

TITANIUM NITRIDE FILMS;

LATTICE CONSTANTS;

COATING; CORROSION RESISTANCE; FILM; ION IMPLANTATION; STAINLESS STEEL; TITANIUM NITRIDE;

EID: 0036394517     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00245-1     Document Type: Article

References (11)