Generation of periodic microstructures with femtosecond laser pulses

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4426, Issue , 2002, Pages 177-179

  Tonshoff H K ^a   Ostendorf, A ^a   Korte, F ^a   Serbin, J ^a   Bauer, T ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

Micromachining; Multi photon process; Periodic structures; Ultrashort laser pulses

Indexed keywords

DIELECTRIC MATERIALS; LASER ABLATION; MICROMACHINING; MICROSTRUCTURE; MULTIPHOTON PROCESSES; PHOTOSENSITIVITY; SOLID STATE LASERS;

FEMTOSECOND LASER PULSES;

ULTRASHORT PULSES;

EID: 0036383168     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.456818     Document Type: Conference Paper

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