Stress and hardness of CrNx films

Materials Research Society Symposium - Proceedings

Volumn 703, Issue , 2002, Pages 153-158

  Janssen, G C A M ^a   Kamminga, J D ^a   Sloof, W G M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; CRYSTAL STRUCTURE; DEFORMATION; HARDNESS; NANOSTRUCTURED MATERIALS; PHYSICAL VAPOR DEPOSITION; SPUTTER DEPOSITION; STRESSES;

CHROMIUM NITRIDE; GROWTH STRESS; NANOCRYSTALLINITY;

CHROMIUM COMPOUNDS;

EID: 0036354146     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)