SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 695, Issue , 2002, Pages 27-32

Residual stress and microstructure of electroplated Cu film on different barrier layers

(6) Volinsky, Alex A a Hauschildt, Meike b Vella, Joseph B a Edwards, N V a Gregory, Rich a Gerberich, William W c

a MOTOROLA INC (United States)

b UNIVERSITY OF TEXAS AT AUSTIN (United States)

c University of Minnesota (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ANNEALING; CRYSTAL GROWTH; CRYSTAL MICROSTRUCTURE; ELECTROPLATING; RESIDUAL STRESSES; SILICON WAFERS; SINGLE CRYSTALS; STRESS CONCENTRATION; TENSILE STRESS; THERMAL CYCLING; THICKNESS MEASUREMENT;

STRESS GRADIENT; STRESS TEMPERATURE CYCLING MEASUREMENT; X RAY POLE FIGURE;

COPPER;

EID: 0036351982 PISSN: 02729172 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (16)

References (19)

1
- 0024766321
- (1989) Metall. Trans. A , vol.20 A , pp. 2217-2245
- Nix, W.D.¹

2
- 0031186506
- (1997) J. Mech. Phys. Solids , vol.45 , Issue.7 , pp. 1137-1159
- Wei, Y.¹ Hutchinson, J.W.²

3
- 0010073779
- (1993) Mat. Res. Soc. Symp. Proc. , vol.239 , pp. 701-706
- Brown, D.D.¹ Borgesen, P.² Lilienfeld, D.A.³ Korhonen, M.A.⁴ Li, C.Y.⁵

4
- 0031703507
- (IEEE, Piscataway)
- (1998) Proceedings of the International Reliability Physics Symposium in 1998 , pp. 324-328
- Toyoda, H.¹ Wang, P.-H.² Ho, P.S.³

5
- 0035386730
- (2001) Z Metallkd. , vol.92 , pp. 803-809
- Zschech, E.¹ Blum, W.² Zienert, I.³ Besser, P.R.⁴

6
- 85010759744
- (2000) Annual Review of Materials Sciences
- Rosenberg, R.¹ Edelstein, D.C.² Hu, C.-K.³ Rodbell, K.P.⁴

7
- 0000776132
- (1999) J. Appl. Phys. , vol.86 , Issue.9 , pp. 4930-4935
- Ueno, K.¹ Ritzdorf, T.² Grace, S.³

8
- 0001325323
- (1999) J. Appl. Phys. , vol.86 , Issue.7 , pp. 3642-3645
- Brongersma, S.H.¹ Richard, E.² Vervoort, I.³ Bender, H.⁴ Vandervorst, W.⁵ Lagrange, S.⁶ Beyer, G.⁷ Maex, K.⁸

9
- 85010719522
- M.S. thesis, The University of Texas at Austin
- (1999)
- Hauschildt, M.¹

10
- 85010719517
- Frontier Semiconductor Measurements Inc.
- FSM 128& 128L Operation Manual Rev. 4/98

11
- 84974183414
- (1986) J. Mater. Res. , vol.1 , pp. 601
- Doerner, M.¹ Nix, W.²

12
- 0026836958
- (1992) J. Mater. Res. , vol.7 , Issue.3 , pp. 613-617
- Pharr, G.M.¹ Oliver, W.C.² Brotzen, F.³

13
- 0026875935
- (1992) J. Mater. Res. , vol.7 , pp. 1564-1583
- Oliver, W.C.¹ Pharr, G.M.²

14
- 85010759710
- (2000) Mat. Res. Soc. Symp. Proc. , vol.649
- Volinsky, A.A.¹ Vella, J.² Adhihetty, I.S.³ Sarihan, V.⁴ Mercado, L.⁵ Yeung, B.H.⁶ Gerberich, W.W.⁷

15
- 0029325729
- (1995) Thin Solid Films , vol.262 , pp. 142-153
- Vinci, R.P.¹ Zielinski, E.M.² Bravman, J.C.³

16
- 0021466347
- (1984) Acta Metall. , vol.32 , Issue.7 , pp. 1117-1138
- Gottstein, G.¹

17
- 85010795557
- (2001) Mater. Res. Soc. Symp. Proc.
- Hauschildt, M.¹ Ogawa, E.T.² Rhee, S.-H.³ Gan, D.⁴ Ho, P.S.⁵

18
- 0000865650
- (1994) J. Appl. Phys. , vol.76 , Issue.5 , pp. 2671-2680
- Tracy, D.P.¹ Knorr, D.B.² Rodbell, K.P.³

19
- 85010729060
- Ph. D. thesis, Stanford University
- (1995)
- Zielinski, E.M.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.