In-situ analysis of the chemical vapor synthesis of nanocrystalline silicon carbide by aerosol mass spectrometry

Materials Research Society Symposium - Proceedings

Volumn 703, Issue , 2002, Pages 173-178

  Lee, In Kyum ^a   Winterer, Markus ^a   Hahn, Horst ^a   Janzen, Christian ^a   Lindackers, Dirk ^a   Roth, Paul ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GRAIN SIZE AND SHAPE; MASS SPECTROMETRY; NANOSTRUCTURED MATERIALS; PARTICLE SIZE ANALYSIS; PYROLYSIS; SILANES; SYNTHESIS (CHEMICAL);

AEROSOL MASS SPECTROMETRY; GAS PHASE PROCESSES; TETRAMETHYLSILANE;

SILICON CARBIDE;

EID: 0036351637     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)