Reduced-Pressure Chemical Vapor Synthesis of Nanocrystalline Silicon Carbide Powders

Chemical Vapor Deposition

Volumn 4, Issue 4, 1998, Pages 143-149

  Klein, Sylke ^a   Winterer, Markus ^a   Hahn, Horst ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Chemical vapor synthesis; Nanocrystalline materials; Process optimization; Silicon carbide

Indexed keywords

AGGLOMERATION; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; NANOSTRUCTURED MATERIALS; POWDERS; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

REDUCED PRESSURE CHEMICAL VAPOR DEPOSITION;

SILICON CARBIDE;

EID: 0032114750     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-3862(199807)04:04<143::AID-CVDE143>3.0.CO;2-Z     Document Type: Article

References (52)

1. See for example: H. Gleiter, Adv. Mater. 1992, 4, 474.
2. Properties of Silicon Carbide (Ed: G. L. Harris), Inspec, London 1995. B. Haigis, A. Pickering, Lasers Optron. 1994, 13(3), 15.
3. Properties of Silicon Carbide (Ed: G. L. Harris), Inspec, London 1995. B. Haigis, A. Pickering, Lasers Optron. 1994, 13(3), 15.
4. K. Liethschmidt, "Silicon Carbide", in Ullmann's Encyclopedia of Industrial Chemistry 1993, Vol. 23, p. 749. Silicon Carbide Ceramics 1 (Eds: S. Somiya, Y. Inomata), Elsevier, Oxford 1991.
5. K. Liethschmidt, "Silicon Carbide", in Ullmann's Encyclopedia of Industrial Chemistry 1993, Vol. 23, p. 749. Silicon Carbide Ceramics 1 (Eds: S. Somiya, Y. Inomata), Elsevier, Oxford 1991.
6. "Silicon Carbide Electronic Materials and Devices", MRS Bull. 1997, 22(3).
7. G. Pensel, R. Helbig, Festkörperprobleme 1990, 30, 133.
8. See for example: S. Sharafat, C. P. C. Wong, E. E. Reis, Fusion Technol. 1991, 19, 901.
9. U. Betz, G. Scipione, E. Bonetti, H. Hahn, unpublished.
10. V. D. Krstic, MRS Bull. 1995, 20(2), 46.
11. R. Vaßen, A. Kaiser, J. Förster, H. P. Buchkremer, D. Stöver, J. Mater. Sci. 1996, 31, 3623.
12. D. Changhong, Z. Xianpeng, Z. Jinsong, Y. Yongjin, C. Lihna, X. Fei, J. Mater. Sci. 1997, 52, 2469.
13. D. A. White, S. M. Oleff, J. R. Fox, Adv. Ceram. Mater. 1987, 2, 53.
14. Y. Ando, M. Ohkohchi, J. Cryst. Growth, 1982, 60, 147.
15. Y. Nariki, Y. Inoue, K. Tanaka, J. Mater. Sci. 1990, 25, 3101.
16. R. Fantoni, E. Borsella, S. Piccirillo, R. Ceccata, S. Enzo, J. Mater. Res. 1990, 5, 143.
17. W. R. Cannon, S. C. Danforth, J. H. Flint, J. S. Haggerty, R. A. Marra, J. Am. Ceram. Soc. 1982, 65, 324.
18. M. Suzuki, Y. Nakata, T. Okutani, A. Kato, J. Mater. Sci. 1992, 27, 6091.
19. F. Curcio, G. Ghighione, M. Musci, C. Nannetti, Appl. Surf. Sci. 1989, 36, 52.
20. J. Förster, M. von Hoesslin, J. Uhlenbusch, Appl. Phys. 1996, B62, 609.
21. G. W. Rice, J. Am. Ceram. Soc. 1986, 69, C183.
22. Y. Li, Y. Liang, F. Zheng, Z. Hu, Mater. Sci. Eng. A, 1994, 174, L23
23. K. E. Gonsalves, P. R. Strutt, T. D. Xiao, P. G. Klemens, J. Mater. Sci. 1992, 27, 3231.
24. W. F. A. Besling, P. J. J. M. van der Put, J. Schoonman, J. Phys. IV 1995, 5, 953.
25. N. Herlin, O. Croix, M. Cauchetier, M. Luce, E. Musset, Nanophase Mater. 1994, 117.
26. M. Musset, M. Cauchetier, N. Herlin, M. Luce, A. Gheoghiu, G. Dufour, H. Roulet, C. Senemaud, High Temp. Chem. Proc. 1994, 3, 535.
27. M. Cauchetier, O. Croix, M. Luce, M. I. Baraton, T. Merle, P. Quintard, J. Eur. Ceram. Soc. 1991, 8, 215.
28. H.-S. Park, H.-S. Seon, S.-W. Rhee, K.-H. Lee, S. Baik, J. Mater. Sci. 1991, 26, 5957.
29. K. Kijima, H. Noguchi, M. Konishi, J. Mater. Sci. 1989, 24, 2929.
30. A. Kuibira, A. Mitsui, J. Hojo, A. Kato, J. Ceram. Soc. Jpn. 1987, 95, 89.
31. T. Kameyama, K. Sakanaka, A. Motoe, T. Tsunoda, T. Nakanaga, N. I. Wakayama, H. Takeo, K. Fukuda, J. Mater. Sci. 1990, 25, 1058.
32. C. W. Zhu, G. Y. Zhao, V. Revankar, V. Hlavacek, J. Mater. Sci. 1993, 28, 659.
33. T. D. Xiao, K. E. Gonsalves, P. R. Strutt, P. G. Klemens, J. Mater. Sci. 1993, 28, 1334.
34. L. Cheng, T. Goto, T. Hirai, J. Mater. Sci. 1990, 25, 4614.
35. M. Endo, T. Sano, K. Mori, N. Urasato, M. Shiraishi, J. Ceram. Soc. Jpn. 1987, 95, 144.
36. H. Wu, D. W. Ready, in Silicon Carbide Symposium, Ceramic Transactions 1987 (Ed: J. D. Cawley), American Ceramic Society, Westerville, OH 1989, p. 235.
37. Z. R. Huang, B. Liang, D. L. Jiang, S. H. Tan, J. Mater. Sci. 1996, 31, 4327.
38. D. J. Larkin, MRS Bull. 1997, 22(3), 36.
39. F. Henry, P. Marti, Y. Casaux, C. Coubescue, A. Figueras, V. Madigou, R. Rodriguez-Clemente, A. Mazel, J. Sevely, B. Armas, J. Phys. IV 1993, 3, C3-329.
40. Y. Avigal, M. Schieber, J. Cryst. Growth 1971, 9, 127.
41. S. Veintemillas, V. Madigou, R. Rodriguez-Clemente, A. Figueras J. Cryst. Growth 1995, 148, 383.
42. K. H. Yoon, J. Desmaison, Surf. Coat. Technol. 1993, 56, 243.
43. M. Lelogeais, M. Ducarroir, Surf. Coat. Technol. 1991, 48, 121.
44. H. Drost, M. Friedrich, R. Mohr, Surf. Coat. Technol. 1995, 74-75, 508.
45. W. Chang, G. Skandan, S. C. Danforth, B. H. Kear, H. Hahn, Nanostruct. Mater. 1994, 4, 507.
46. Y. Okabe, J. Hojo, A. Kato, J. Less-Common Met. 1979, 68, 29.
47. R. P. Clifford, B. G. Gowenlock, C. A. F. Johnson, J. Stevenson, J. Org. Met. Chem. 1972, 34, 53.
48. J. E. Taylor, T. S. Milazzo, J. Phys. Chem. 1978, 82, 847.
49. W. C. Hinds, in Aerosol Measurement - Principles, Techniquies, and Applications (Eds: K. Willeke, P. A. Baron), Van Nostrand Reinhold, New York 1993, Ch. 4.
50. S. Klein, M. Winterer, H. Hahn, in Proc. of the 1997 MRS Fall Mtg., in press.
51. G. W. Rice, R. L. Woodin, J. Mater. Res. 1989, 4, 1538.
52. G. Fritz, G. Marquardt, Z. Anorg. Allg. Chem. 1974, 404, 1.