Add ceramic "MEMS" to the pallet of microsystems technologies

Materials Research Society Symposium - Proceedings

Volumn 687, Issue , 2002, Pages 225-242

  Wilcox Sr , David L ^a   Burdon, Jeremy W ^a   Changrani, Rajnish ^a   Chou, Chia Fu ^a   Dai, Steve ^a   Koripella, Ramesh ^a   Oliver, Manny ^a   Sadler, Daniel ^a   Von Allmen, Paul ^a   Zenhausern, Frederic ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; CERAMIC MATERIALS; FLUIDIC DEVICES; INTEGRATED CIRCUIT MANUFACTURE; MECHATRONICS; MICROELECTRONIC PROCESSING; MULTILAYERS; OPTICAL DEVICES; SEMICONDUCTOR DEVICE MANUFACTURE; TECHNOLOGY TRANSFER; THREE DIMENSIONAL;

MICROSYSTEMS TECHNOLOGY; MORPHING; MULTILAYER CERAMIC FABRICATION TECHNOLOGY; THERMONIC FUNCTIONS; THREE DIMENSIONAL MICROCHANNELS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036351579     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

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