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Chinese Physics (Overseas Edition)

Volumn 11, Issue 5, 2002, Pages 492-495

Structural properties of polycrystalline silicon films formed by pulsed rapid thermal processing

(8) Wang, Yong Qian a Liao, Xian Bo a Diao, Hong Wei a Zhang, Shi Bin a Xu, Yan Yue a Chen, Chang Yong a Chen, Wei De a Kong, Guang Lin a

a INSTITUTE OF SEMICONDUCTORS (China)

Author keywords

Microstructure; Polycrystalline silicon film; Rapid thermal processing

Indexed keywords

EID: 0036338568 PISSN: 10091963 EISSN: None Source Type: Journal
DOI: 10.1088/1009-1963/11/5/315 Document Type: Article

Times cited : (6)

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