Analysis of Residual Stress Gradient in MEMS Multi-layer Structure

International Journal of Nonlinear Sciences and Numerical Simulation

Volumn 3, Issue 3-4, 2002, Pages 727-730

  Qian, Jin ^a   Zhao, Ya Pu ^a   Zhu, Ru Zeng ^a   Yu, Tong Xi ^b  

^a INSTITUTE OF MECHANICS   (China)

^b HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

Electron density; Gradient; MEMS; Multi layer; Residual stress; TFD; Thin films

Indexed keywords

EID: 0036325103     PISSN: 15651339     EISSN: None     Source Type: Journal    
DOI: 10.1515/IJNSNS.2002.3.3-4.727     Document Type: Article

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