A MEMS Flowmeter for Measuring Very Small Flow Rates

International Journal of Nonlinear Sciences and Numerical Simulation

Volumn 3, Issue 3-4, 2002, Pages 273-276

  Tung, Steve ^a   Sheppard, Jason ^a   Chiu, Edward ^b  

^a 3202 Bell Engineering Center   (United States)

^b Umachines Inc   (United States)

Author keywords

Flowmeter; MEMS; Microfluidics; Sensors

Indexed keywords

EID: 0036319846     PISSN: 15651339     EISSN: None     Source Type: Journal    
DOI: 10.1515/IJNSNS.2002.3.3-4.273     Document Type: Article

References (2)

1. XuYong, Chen-Wei Chiu, Fukang Jiang, Qiao Lin, and Yu-Chong Tai, "Mass Flowmeter Using a Multi-Sensor Chip", Thirteenth IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), Miyazaki, Japan, Jan. 23-27 (2000).
2. Lin Qiao, Fukang Jiang, Xuan-Qi Wang, Zhigang Han, Yu-Chong Tai, James Lew, and Chih-Ming Ho, "MEMS Thermal Shear-Stress Sensors: Experiments, Theory and Modeling", Proc. 2000 Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, pp. 304-307, (2000).