Mass flowmeter using a multi-sensor chip

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 541-546

  Xu, Yong ^a   Chiu, Chen Wei ^a   Jiang, Fukang ^a   Lin, Qiao ^a   Tai, Yu Chong ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOWMETERS; LAMINAR FLOW; MICROMACHINING; MICROSENSORS; PRESSURE TRANSDUCERS; SHEAR STRESS;

MASS FLOWMETER; SHEAR STRESS SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033692509     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)