Model of linewidth for laser writing on a photoresist

Applied Optics

Volumn 41, Issue 5, 2002, Pages 895-901

  Salgueiro, José Ramón ^a   Moreno, Vicente ^a   Liñares, Jesús ^a  

^a UNIVERSITY OF SANTIAGO DE COMPOSTELA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

BESSEL FUNCTIONS; EXTRAPOLATION; LASER APPLICATIONS; LASER BEAMS; LASER TUNING; MATHEMATICAL MODELS;

LASER SPOTS; LASER WRITING;

PHOTORESISTS;

EID: 0036307547     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.000895     Document Type: Article

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