Ion-induced damage and annealing of silicon. Molecular dynamics simulations

Pure and Applied Chemistry

Volumn 74, Issue 3, 2002, Pages 419-422

  Humbird, David ^a   Graves, David B ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON;

CONFERENCE PAPER; CRYSTALLIZATION; ENERGY; ION TRANSPORT; MOLECULAR DYNAMICS; PRIORITY JOURNAL; SIMULATION; SURFACE PROPERTY; THICKNESS; TRANSPORT KINETICS;

EID: 0036299154     PISSN: 00334545     EISSN: None     Source Type: Journal    
DOI: 10.1351/pac200274030419     Document Type: Conference Paper

References (10)