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Volumn , Issue , 2002, Pages 760-762
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Design for reliability of micro-electro-mechanical systems (MEMS)
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRONICS PACKAGING;
OPTICAL INTERCONNECTS;
RELIABILITY;
SENSORS;
MICROSYSTEMS;
MICROELECTROMECHANICAL DEVICES;
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EID: 0036287423
PISSN: 05695503
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (6)
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References (2)
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