Electrostatic correction of the chromatic and of the spherical aberration of charged-particle lenses (Part II)

Journal of Electron Microscopy

Volumn 51, Issue 1, 2002, Pages 45-51

  Weißbäcker, Christoph ^a   Rose, Harald ^a  

^a Inst of Applied Physics   (Germany)

Author keywords

Aberration correction; Chromatic aberration; Electrostatic aplanat; Electrostatic corrector; Ion probe; Spherical aberration

Indexed keywords

ARTICLE;

ABERRATIONS; CHARGED PARTICLES; ELECTRIC FIELDS; ELECTRIC POWER SYSTEMS; GEOMETRY;

ABERRATION CORRECTION; APLANAT; CHROMATIC ABERRATION; ELECTROSTATIC APLANAT; ELECTROSTATIC CORRECTION; ELECTROSTATIC CORRECTOR; ION PROBE; SPHERICAL ABERRATIONS; SYMMETRICS; THIRD-ORDER ABERRATION;

LENSES;

EID: 0036216582     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/jmicro/51.1.45     Document Type: Article

References (11)

1. Über einige fehler von elektronenlinsen
2. Electrostatic correction of the chromatic and of the spherical aberration of charged-particle lenses (Part I)
3. Sphärische und chromatische korrektur von elektronen-linsen
4. Successive approximation for charged-particle motion
5. Hamiltonian magentic optics
6. Gauge invariance in the eikonal method
7. Design of a high-resolution low-voltage scanning electron microscope
8. Design of a monochromator for electron sources