Electrical studies on amorphous silicon carbide nitride films

Journal of Materials Science Letters

Volumn 21, Issue 1, 2002, Pages 7-8

  Alizadeh, Z ^a   Sundaram, K B ^a  

^a University of Central Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; PERMITTIVITY; SILICON NITRIDE; THIN FILMS;

SILICON CARBIDE NITRIDE FILMS;

AMORPHOUS FILMS;

EID: 0036206082     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1014217906295     Document Type: Article

References (8)