Ozone injection system for bacterial control and sterilization in high-purity water

Ultrapure Water

Volumn 19, Issue 1, 2002, Pages 40-45

  Boswell, Tracy ^a   Caravageli, Demas ^a   Hardwick, Steven J ^a  

^a NONE

Author keywords

Microbials; Ozone; Particles; Semiconductors; TOC

Indexed keywords

COST-BENEFIT ANALYSIS; OZONE; PURIFICATION; TESTING METHOD; WATER TREATMENT;

EID: 0036166020     PISSN: 07478291     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (6)

1. Production of high concentrations of bubble-free dissolved ozone in water
2. Diffusivity of ozone in water
3. Light-dependent compensation of TOC measurement and its relationship with dissolved oxygen concentrations in ultrapure rinse waters for semiconductor manufacturing