Production of high concentrations of bubble-free dissolved ozone in water

Solid State Phenomena

Volumn 65-66, Issue , 1999, Pages 59-62

  Gottschalk, C ^a   Beuscher, U ^b   Hardwick, S ^b   Kobayashi, M ^c   Schweckendiek, J ^a   Wikol, M ^b  

^a ASTeX GmbH   (Germany)

^b W L GORE AND ASSOCIATES   (United States)

^c Japan Gore Tex Inc   (Japan)

Author keywords

Contactor; Membrane; Ozone

Indexed keywords

HIGH PRESSURE EFFECTS IN SOLIDS; HYDROFLUORIC ACID; MASS TRANSFER; OZONE WATER TREATMENT; POLYMERIC MEMBRANES; POLYTETRAFLUOROETHYLENES; SOLUBILITY; SURFACE CLEANING;

BUBBLE-FREE DISSOLVED OZONE; WET CLEANING;

SILICON WAFERS;

EID: 0032784796     PISSN: 10120394     EISSN: 16629779     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.65-66.59     Document Type: Conference Paper

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