Photocreated defects in very thin hydrogenated amorphous silicon films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 11, 2002, Pages 6327-6328

  Shimizu, Tatsuo ^a   Shimada, Masaki ^a   Kumeda, Minoru ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

Electron spin resonance; Hydrogenated amorphous silicon; Photocreated defects; Surface defects

Indexed keywords

AMORPHOUS FILMS; DEFECTS; HYDROGENATION; PARAMAGNETIC RESONANCE;

HYDROGENATED AMORPHOUS SILICON FILM; PHOTOCREATED DEFECT;

AMORPHOUS SILICON;

EID: 0036157537     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.6327     Document Type: Article

References (10)