Fabrication of GaAs hole array as a 2D-photonic crystal and their application to photonic bandgap waveguide

Optical and Quantum Electronics

Volumn 34, Issue 1-3, 2002, Pages 183-193

  Nakao, M ^a   Oku, S ^a   Tanaka, H ^a   Shibata, Y ^a   Yokoo, A ^a   Tamamura, T ^a   Masuda, H ^b  

^a NTT CORPORATION   (Japan)

^b TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

2D photonic crystal; Alumina mask; Defect type waveguide; GaAs holo array

Indexed keywords

ALUMINA; ASPECT RATIO; CRYSTAL LATTICES; DRY ETCHING; ENERGY GAP; FABRICATION; MASKS; PHOTONS; REFLECTION; WAVEGUIDES;

PHOTONIC BANDGAP (PBG); PHOTONIC CRYSTALS;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0036154479     PISSN: 03068919     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1013329631972     Document Type: Article

References (15)

1. Photonic band gap materials