The determination of thermal annealing effect on a-Si:H films coated on glass and on single crystalline of silicon

Turkish Journal of Physics

Volumn 26, Issue 1, 2002, Pages 53-59

  Serin, Necmi ^a   Serin, Tülay ^a   Özdemir, Ali Riza ^a   Alkan, Bora ^a   Tarimci, Çelik ^a   Ünal, Basri ^a  

^a ANKARA UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; DIFFUSION; ELECTRIC FIELD EFFECTS; HYDROGENATION; INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; RAPID THERMAL ANNEALING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GLASS; SINGLE CRYSTALS;

INFRARED VIBRATIONAL SPECTRA;

AMORPHOUS FILMS;

EID: 0036149551     PISSN: 13000101     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (19)