Epitaxial Y2O3 film growth on an oxidized Si surface

Thin Solid Films

Volumn 402, Issue 1-2, 2002, Pages 38-42

  Cho, M H ^a   Ko, D H ^a   Choi, Y K ^a   Lyo, I W ^a   Jeong, K ^a   Whang, C N ^a  

^a Yonsei University   (South Korea)

Author keywords

Oxides; Yttrium

Indexed keywords

CRYSTAL STRUCTURE; EPITAXIAL GROWTH; FILM GROWTH; HIGH RESOLUTION ELECTRON MICROSCOPY; NUCLEATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; X RAY DIFFRACTION;

INTERFACIAL REACTIONS;

YTTRIUM COMPOUNDS;

EID: 0036147654     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01625-X     Document Type: Letter

References (17)