Monte Carlo simulation of ions inside a cylindrical bore for plasma source ion implantation

Journal of Applied Physics

Volumn 91, Issue 1, 2002, Pages 32-35

  Liu, Chengsen ^a   Wang, Dezhen ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE DISTRIBUTION; AUXILIARY ELECTRODES; CHARGE EXCHANGES; CROSS SECTION; CYLINDRICAL BORE; ION ENERGIES; ION IMPACT ENERGY; MONTE CARLO SIMULATION; MONTE CARLO TECHNIQUES; NEUTRAL GAS; PLASMA SOURCE ION IMPLANTATION;

CHARGE TRANSFER; ION BOMBARDMENT; IONS; MONTE CARLO METHODS; PLASMA SOURCES;

ION IMPLANTATION;

EID: 0036139355     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1421239     Document Type: Article

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