Composition and structure of silicon-carbide alloys obtained by hot wire and hot wire plasma assisted techniques

Vacuum

Volumn 64, Issue 3-4, 2002, Pages 261-266

  Ferreira, I ^a   Cabrita, A ^a   Fortunato, E ^a   Martins, R ^a  

^a Center of Excellence in Microelectronics Optoelectronics and Processes   (Portugal)

Author keywords

Hot wire; Hot wire plasma assisted; Silicon carbide alloys

Indexed keywords

ENERGY GAP; ETHYLENE; GRAIN SIZE AND SHAPE; GRANULAR MATERIALS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON ALLOYS; STRUCTURE (COMPOSITION); THIN FILMS;

HOT WIRES;

SILICON CARBIDE;

EID: 0036135047     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00296-2     Document Type: Article

References (13)