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Volumn 82-84, Issue , 2002, Pages 231-236

Characterization of interstitial-related bulk defects in p- silicon substrates by epitaxial deposition

(4) Schmolke, R a Angelberger, W a Von Ammon, W a Bender, H a

Author keywords

A swirl; Epitaxial deposition; L pit; Secco etch; Silicon self interstitial; TEM

Indexed keywords

DISLOCATIONS (CRYSTALS); EPITAXIAL GROWTH; ETCHING; LIGHT SCATTERING; POINT DEFECTS; SILICON WAFERS; SUBSTRATES; SURFACES; TRANSMISSION ELECTRON MICROSCOPY; VECTORS;

BURGERS VECTOR ANALYSIS; EPITAXIAL DEPOSITION; INTERSTITIAL RELATED BULK DEFECTS; SECCO ETCHING; SELF INTERSTITIAL; WARTS;

SEMICONDUCTING SILICON;

EID: 0036131386 PISSN: 10120394 EISSN: None Source Type: Book Series
DOI: None Document Type: Conference Paper

Times cited : (3)

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