Characterization of micromachined acoustic ejector and its applications

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 264-267

  Chou, Tsung Kuang A ^a   Najafi, Khalil ^a   Muller, Michael O ^a   Bernal, Luis P ^a   Washabaugh, Peter D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Micro propulsion; Micro jet; Pumping

Indexed keywords

ACOUSTIC ARRAYS; ANEMOMETERS; COMPUTER SIMULATION; DIAPHRAGMS; EJECTORS (PUMPS); ELECTRODES; INTEGRATED CIRCUIT LAYOUT; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NOZZLES; PROPULSION; RESONATORS;

GAS PUMPING; HOT WIRE ANEMOMETRY; MICRO JET; MICRO PROPULSION; MICROMACHINED ACOUSTIC EJECTORS;

ACOUSTIC DEVICES;

EID: 0036124146     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. High-density micromachined acoustic ejector for micro propulsion
2. 3D MEMS fabrication using low-temperature wafer bonding with benzocyclobutene (BCB)
3. Thrust performance of micromachined synthetic jets
4. All-silicon micromachined acoustic ejector arrays for micro propulsion and flow control
5. Performance of ultrasonic electrostatic resonators for use in micro propulsion
6. Gas damping and spring constant effects on MEMS devices with multiple perforations and multiple gaps
7. Acoustical resistance of electrostatic transducers