Self-assembly templates by selective plasma surface modification of micropatterned photoresist

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 192-195

  Seo, Jeonggi ^a   Ertekin, Elif ^a   Pio, Michael S ^a   Lee, Luke P ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROPHILICITY; HYDROPHOBICITY; MICROSTRUCTURE; PLASMA APPLICATIONS; PROTEINS; SEMICONDUCTING SILICON; SURFACE TREATMENT;

MICROPATTERNED PHOTORESIST; SELECTIVE PLASMA SURFACE; SELF ASSEMBLY TEMPLATE;

MICROELECTROMECHANICAL DEVICES;

EID: 0036122130     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)