LEd-SpEC: Spectroscopic detection of water contaminants using glow discharges from liquid microelectrodes

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 248-251

  Wilson, Chester G ^a   Gianchandani, Yogesh B ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; GLOW DISCHARGES; IMPURITIES; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUITS; LEAD; MICROELECTRODES; PH; SODIUM; SPECTROSCOPIC ANALYSIS; SPUTTERING; WATER;

IMPURITY CONCENTRATION; ION MOBILITY MASS SPECTROMETERS; LIQUID ELECTRODE SPECTRAL EMISSION CHIP; LIQUID ELECTRODES; LIQUID SOLUTION;

MICROELECTROMECHANICAL DEVICES;

EID: 0036120690     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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