Development of SiCN ceramic thermal actuators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 590-593

  Liew, Li Anne ^a   Bright, Victor M ^a   Dunn, Martin L ^a   Daily, John W ^a   Raj, Rishi ^a  

^a UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CERAMIC MATERIALS; CONDUCTIVE MATERIALS; ELECTRIC CONDUCTIVITY OF SOLIDS; FABRICATION; GRIPPERS; HOT ISOSTATIC PRESSING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PYROLYSIS; SILICON COMPOUNDS;

ELECTRO THERMOMECHANICAL DEVICE; MICROGRIPPERS; MICROMACHINING PROCESS; POST PYROLYSIS ANNEALING; SILICON CARBON NITRIDE CERAMIC THERMAL ACTUATORS;

MICROACTUATORS;

EID: 0036118177     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. Synthesis of dense silicon-based ceramics at low temperature
2. Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique
3. Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer
4. Application of microforging in SiCN MEMS structure fabrication
5. Applications for surface micromachined polysilicon thermal actuator and arrays
6. Silicon carbonitride ceramics derived from polysilazanes, Part II: Investigation of electrical properties
7. Structure and electronic transport properties of Si-(B)-C-N ceramics
8. Fabrication of novel polysilazane MEMS structures by micro casting
9. Fabrication process for ultra high aspect ratio polysilazane-derived MEMS