CMOS single-chip multisensor gas detection system

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 244-247

  Hagleitner, C ^a   Lange, D ^a   Kerness, N ^a   Kummer, A ^a   Song, W H ^a   Hierlemann, A ^a   Brand, O ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHIP SCALE PACKAGES; CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MICROSENSORS; ORGANIC COATINGS; ORGANIC POLYMERS; SEMICONDUCTING SILICON; SENSOR DATA FUSION; TRANSDUCERS; VOLATILE ORGANIC COMPOUNDS;

MICROMACHINED TRANSDUCERS; OFF-CHIP RECORDING UNITS; ON-CHIP SIGNAL CONDITIONING; TEMPERATURE SENSOR; VOLATILE ABSORPTION;

CHEMICAL SENSORS;

EID: 0036118150     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. Application-specific sensor systems based on CMOS chemical microsensors
2. Industrial fabrication method for arbitrarily shaped silicon N-well micromechanical structures