Vertical motion microactuator based on the concept of ECLIA (Electrostatic Controlled Linear Inchiworm Actuator)

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 602-605

  Konishi, Satoshi ^a   Yoshifuji, Kenji ^a   Munechika, Masaki ^a   Kawaguchi, Gaku ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATIC ACTUATORS; FABRICATION; LINEAR CONTROL SYSTEMS; MICROELECTROMECHANICAL DEVICES; MOTION CONTROL; SUBSTRATES;

ARRAYED ACTUATORS; DRIVING ENERGY SOURCE; ELECTROSTATIC CONTROLLED LINEAR INCHWORM ACTUATOR; LINEAR MOTION; SLIDERS; VERTICAL MOTION MICROACTUATOR;

MICROACTUATORS;

EID: 0036118052     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. Microfabricated hinges
2. Microactuated self-assembling of 3D polysilicon structures with reshaping technology
3. Fabrication method for out-of-plane coil by surface micromachining
4. New opportunities for micro actuators
5. A conveyance system using air flow based on the concept of distributed micro motion systems
6. System design for cooperative control of a microactuator array
7. Intricate Mechanisms-on-chip enabled by 5-level surface micromachining
8. The digital micromirror device and its application to projection displays
9. Design fabrication and testing of new comb actuators realizing three-dimensional continuous motions
10. Electrostatically-driven-leverage actuator as an engine for out-of-plane motion
11. Dual-mode micromirrors for optical phased array applications
12. Parallel linear actuator system with high accuracy and large stroke