Using IS modeling to understand the effect of growth conditions and film attributes on AC conduction in CVD diamond

Conference Proceedings - IEEE SOUTHEASTCON

Volumn , Issue , 2002, Pages 33-41

  Bataineh, Mohannad M ^a   Khatami, Saeid ^b   Reinhard, D K ^c   Asmussen, Jes ^c  

^a UNIVERSITY OF WEST FLORIDA   (United States)

^b MAXIM INTEGRATED PRODUCTS   (United States)

^c MICHIGAN STATE UNIVERSITY   (United States)

Author keywords

CVD diamond; Deposition parameters; Electrical properties; Impedance spectroscopy; IS modeling

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY; FILM GROWTH; FLOW OF FLUIDS; GRAIN SIZE AND SHAPE; POLYCRYSTALLINE MATERIALS; SPECTROSCOPIC ANALYSIS;

POLYCRYSTALLINE DIAMONDS;

DIAMOND FILMS;

EID: 0036085478     PISSN: 07347502     EISSN: None     Source Type: Journal    
DOI: 10.1109/SECON.2002.995553     Document Type: Article

References (24)