Mechanisms of heat and oxygen transfer in silicon melt in an electromagnetic Czochralski system

Journal of Crystal Growth

Volumn 243, Issue 1, 2002, Pages 55-65

  Kakimoto, Koichi ^a   Tashiro, Akimasa ^a   Shinozaki, Takashige ^a   Ishii, Hideo ^a   Hashimoto, Yoshio ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

A1. Computer simulation; A2. Czochralski method; B2. Semiconducting silicon

Indexed keywords

COMPUTER SIMULATION; CRYSTAL GROWTH FROM MELT; ELECTRODES; HEAT TRANSFER; NATURAL CONVECTION;

ELECTROMAGENTIC FORCES;

SEMICONDUCTING SILICON;

EID: 0036071987     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(02)01473-2     Document Type: Article

References (12)