Sensitivity analysis of calibration standards for fixed probe spacing on-wafer calibration techniques

IEEE MTT-S International Microwave Symposium Digest

Volumn 3, Issue , 2002, Pages 2257-2260

  Safwat, Amr M E ^a   Hayden, Leonard ^a  

^a Cascade Microtech Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; ELECTRIC IMPEDANCE; INDUCTANCE; MATHEMATICAL MODELS; PROBES; SCATTERING PARAMETERS; SENSITIVITY ANALYSIS; SILICON WAFERS; STANDARDS;

CALIBRATION STANDARDS; ON-WAFER CALIBRATION;

INTEGRATED CIRCUIT TESTING;

EID: 0036066168     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. On-wafer vector network analyzer calibration and measurements
2. Applying error correction to network analyzer measurements
3. Two-port network analyzer calibration using an unknown thru
4. An SOLR calibration for accurate measurement of orthogonal on-wafer DUTs
5. A multiline method of network analyzer calibration
6. Achieving greater on-wafer S-parameter accuracy with the LRM calibration technique
7. LRM and LRRM calibrations with automatic determination of lead inductance
8. Sensitivity analysis of calibration standards for SOLT and LRRM
9. Calibration comparison method for vector network analyzers