Vanadium oxide thin films deposited on indium tin oxide glass by radio-frequency magnetron sputtering

Chinese Physics (Overseas Edition)

Volumn 11, Issue 7, 2002, Pages 737-740

  Wang, Xue Jin ^a   Fei, Yun Jie ^a   Xiong, Yan Yun ^a   Nie, Yu Xin ^a   Feng, Ke An ^a   Li, Lin Del ^a  

^a INSTITUTE OF PHYSICS   (China)

Author keywords

Annealing; Sputtering; Vanadium oxide; X ray photoelectron spectroscopy

Indexed keywords

CRYSTALLINE MATERIALS; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; PHOTOELECTRON SPECTROSCOPY; VANADIUM COMPOUNDS; X RAY DIFFRACTION;

ENERGY POSITION; RADIO-FREQUENCY MAGNETRON SPUTTERING; VANADIUM OXIDE; VANADIUM OXIDE THIN FILMS;

THIN FILMS;

EID: 0036059859     PISSN: 10091963     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-1963/11/7/317     Document Type: Article

References (14)