Fabrication of microstructures for microphotonic circuit

Materials Research Society Symposium - Proceedings

Volumn 692, Issue , 2002, Pages 691-695

  Chakraborty, Subhasish ^a   Hasko, D G ^a   Mears, R J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; ELECTRON BEAM LITHOGRAPHY; ENERGY GAP; LIGHT PROPAGATION; OPTICAL WAVEGUIDES; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY;

MICROPHOTONIC CIRCUITS; PHOTONIC BAND GAP (PBG);

SEMICONDUCTOR DEVICE STRUCTURES;

EID: 0036056172     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. Photonic crystals: Putting a new twist on light
2. Two-dimensional photonic bandgap structures operating at near-infrared wavelengths
3. Photonic band-gap structures
4. Photonic-bandgap microcavities in optical waveguides
5. 2 waveguide: Experiments and model
6. Sub-50 nm high aspect ratio silicon pillars, ridges, and wenches fabricated using ultrahigh resolution electron beam lithography and reactive ion etching
7. Silicon on insulator photoelastic optical waveguide and polarizer