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Volumn , Issue , 2002, Pages 54-55

Highly manufacturable sub-100 nm DRAM integrated with full functionality

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITORS; CHEMICAL VAPOR DEPOSITION; GATES (TRANSISTOR); POLYSILICON;

EID: 0036050030     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (3)

References (4)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.