Improved spectroscopic characteristics of helium inductively coupled plasma by hydrogen additive

Bunseki Kagaku

Volumn 51, Issue 10, 2002, Pages 937-942

  Miyahara, Hidekazu ^a   Yabuta, Hironobu ^a   Hayashi, Yasushi ^a   Hotta, Eiki ^a   Okino, Akitoshi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Electron number density; Excitation temperature; Helium ICP; Hydrogen; Robustness

Indexed keywords

HYDROGEN;

ANALYTIC METHOD; ARTICLE; ATOMIC ABSORPTION SPECTROMETRY; DENSITY; ELECTRON TRANSPORT; FLOW RATE; MASS SPECTROMETRY; TEMPERATURE MEASUREMENT;

EID: 0036032602     PISSN: 05251931     EISSN: None     Source Type: Journal    
DOI: 10.2116/bunsekikagaku.51.937     Document Type: Article

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