Generation and characteristics of a pulse-modulated helium inductively coupled plasma

Bunseki Kagaku

Volumn 51, Issue 2, 2002, Pages 105-110

  Yabuta, Hironobu ^a   Miyahara, Hidekazu ^a   Watanabe, Masato ^a   Okino, Akitoshi ^a   Hotta, Eiki ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Helium ICP; Pulse modulated plasma

Indexed keywords

GLASS; HELIUM; SILICON DIOXIDE;

AMPLITUDE MODULATION; ARTICLE; ATMOSPHERIC PRESSURE; DEVICE; EXCITATION; FLOW; IONIZATION; MELTING POINT; TEMPERATURE; VORTEX MOTION;

EID: 0036108732     PISSN: 05251931     EISSN: None     Source Type: Journal    
DOI: 10.2116/bunsekikagaku.51.105     Document Type: Article

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