Planarization for the integration of CMOS and micro mirror arrays

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4689 II, Issue , 2002, Pages 1070-1076

  Zheng, Yun ^a,b   Dutta, Mitra ^b   Kotecki, Carl ^b   Zincke, Chris ^a,b  

^a QSS GROUP INC   (United States)

^b NASA GODDARD SPACE FLIGHT CENTER   (United States)

Author keywords

BCB; CMOS; MEMS; Micro Mirror Array; Photolithography; Planarization

Indexed keywords

ELECTRIC POTENTIAL; INFRARED RADIATION; MICROELECTROMECHANICAL DEVICES; MIRRORS; PHOTOLITHOGRAPHY; SILICON WAFERS; THERMAL CYCLING;

PLANARIZATION;

CMOS INTEGRATED CIRCUITS;

EID: 0036031569     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.473435     Document Type: Article

References (4)

1. Mather, J., Stockman, P., Jakobsen, P., Lilly, S., "Next Generation Space Telescope Instrument Complement Recommendation", NGST Document #549 (January 10, 2000).
2. MacKenty, J.W. et. al., "NGST-MOS: A Multi-Object Spectrometer Using Micro Mirror Arrays", Final Report of the NGST-MOS Pre-Phase A Science Instrument Study, NGST Document #496 (September 1999).
3. Texas Instruments Technical Journal, Vol 15, No. 3, July-September 1998.
4. Dutta, S.B. et. al. "Development of Individually Addressable Micro-Mirror-Arrays for Space Applications", Proc. SPIE conf on MOEMS and Miniaturized Systems 4178-38; Santa Clara, September 2000.