Evaluating the resolution of a CD-SEM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4689 I, Issue , 2002, Pages 336-346

  Rosenberg, Ira J ^a  

^a SCHLUMBERGER   (United States)

Author keywords

Bandwidth; Fourier transform; Optical transform function; Rayleigh; Resolution; SEM; Signal to noise ratio

Indexed keywords

ALGORITHMS; BANDWIDTH; DIFFRACTION; FOURIER TRANSFORMS; MEASUREMENTS; OPTICS; SCANNING ELECTRON MICROSCOPY; SIGNAL TO NOISE RATIO;

OPTICAL TRANSFORM FUNCTIONS;

OPTICAL RESOLVING POWER;

EID: 0036031378     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.473472     Document Type: Conference Paper

References (6)

1. th ed. (1980), but the terminology is dated. A more relevant approach might be that of Mitsugu Sato, Resolution, in Handbook of Charged Particle Optics, Jon Orloff, ed., CRC Press, Boca Raton, FL (1997) pp. 319-361.
2. th ed. (1980), but the terminology is dated. A more relevant approach might be that of Mitsugu Sato, Resolution, in Handbook of Charged Particle Optics, Jon Orloff, ed., CRC Press, Boca Raton, FL (1997) pp. 319-361.
3. th ed. (1980), but the terminology is dated. A more relevant approach might be that of Mitsugu Sato, Resolution, in Handbook of Charged Particle Optics, Jon Orloff, ed., CRC Press, Boca Raton, FL (1997) pp. 319-361.
4. Joy, David C., Yeong-Uk Ko, and Justin J. Hwu, Metrics of Resolution and Performance for CD-SEMs, Proceedings of SPIE 3998, 108-115 (2000). The paper, as well as the SMART macro, is available at http://web.utk.edu/̃srcutk.
5. M. Sato and J. Orloff, Ultramicroscopy 41 (1992) 181-192. Also Sato, op. cit. and included references.
6. This number represents the result for the OTF (which is the autocorrelation of the pupil function) when the frequency matches that of the Rayleigh criterion: f=α/0.61λ. In this approach, the maximum frequency cutoff ("0%",f=α/0.5λ) corresponds to the Dawe's resolution criterion, which is sometimes used in astronomy (or at least, with its minimal stringency, telescope marketing). Also see the references cited in 1., above.