Spectroscopy, actinometry and simulation of a DC discharge in CO/H2 gas mixtures

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4460, Issue , 2002, Pages 285-295

  Filippov, Anatoly V ^a   Pal, Alexander F ^a   Mankelevich, Yuri A ^b   Rakhimov, Alexander T ^b   Serov, Alexander O ^b   Suetin, Nikolay V ^b  

^a TROITSK INSTITUTE FOR INNOVATION AND FUSION RESEARCH   (Russian Federation)

^b MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

2D model; Actinometry; Atomic hydrogen; DC discharge CVD reactor; H C O chemistry; Spectroscopy

Indexed keywords

CARBON MONOXIDE; CHEMICAL VAPOR DEPOSITION; EMISSION SPECTROSCOPY; GAS HEATING; HYDROGEN;

OPTICAL EMISSION SPECTROSCOPY;

ELECTRIC DISCHARGES;

EID: 0036028753     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.459406     Document Type: Article

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