Numerical simulation of silane decomposition in an RF plasma

Technical Physics

Volumn 47, Issue 6, 2002, Pages 760-766

  Strunin, V I ^a   Lyakhov, A A ^a   Khudaibergenov, G Zh ^a   Shkurkin, V V ^a  

^a OMSK STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036018355     PISSN: 10637842     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1486201     Document Type: Article

References (11)

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