Optimization of the sputtering process for depositing composite thin films

Journal of the Korean Physical Society

Volumn 40, Issue 3, 2002, Pages 511-515

  Farooq, M ^a   Lee, Z H ^b  

^a Pakistan Council of RET 25   (Pakistan)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Composites; Sputtering; Thin film; Vacuum

Indexed keywords

EID: 0036004549     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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