UV light activation of tin oxide thin films for NO2 sensing at low temperatures

Sensors and Actuators, B: Chemical

Volumn 78, Issue 1-3, 2001, Pages 73-77

  Comini, E ^a   Faglia, G ^a   Sberveglieri, G ^a  

^a INFM   (Italy)

Author keywords

Gas sensing; NO2; SnO2; Sputtering; Thin film

Indexed keywords

NITROGEN OXIDES; OXIDATION; SEMICONDUCTING FILMS; SEMICONDUCTING TIN COMPOUNDS; SPUTTER DEPOSITION; THIN FILMS; ULTRAVIOLET RADIATION;

RHEOTAXIAL GROWTH-THERMAL OXIDATION (RGTO) METHOD;

CHEMICAL SENSORS;

EID: 0035975012     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00796-1     Document Type: Article

References (11)

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