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Volumn 15, Issue 4-5, 2001, Pages 157-162
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Fracture toughness of diamond-like carbon films
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Author keywords
[No Author keywords available]
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Indexed keywords
CARBON;
SILICON;
ARTICLE;
CRYSTALLIZATION;
FILM;
HARDNESS;
TEMPERATURE DEPENDENCE;
THICKNESS;
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EID: 0035961821
PISSN: 02179849
EISSN: None
Source Type: Journal
DOI: 10.1142/s0217984901001550 Document Type: Article |
Times cited : (2)
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References (7)
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