Nitridation of steel using a microwave ECR plasma

Vacuum

Volumn 64, Issue 2, 2001, Pages 163-168

  Naddaf, M ^a   Hullavarad, S S ^a   Bhoraskar, V N ^a   Sainkar, S R ^b   Mandale, A B ^b   Bhoraskar, S V ^a  

^a UNIVERSITY OF PUNE   (India)

^b NATIONAL CHEMICAL LABORATORY   (India)

Author keywords

ECR plasma; Hardness; Nitridation

Indexed keywords

COMPOSITION EFFECTS; ELECTRON CYCLOTRON RESONANCE; MICROHARDNESS; MICROSTRUCTURE; MICROWAVES; NITRIDING; PLASMA APPLICATIONS; SUBSTRATES; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

PLASMA REACTORS;

STEEL;

EID: 0035960550     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00386-4     Document Type: Article

References (17)